Please verify that (1) all pages are present, (2) all figures are acceptable, (3) all fonts and special characters are correct, and (4) all text and figures fit within the margin lines shown on this review document. Return to your MySPIE ToDo list and approve or disapprove this submission. 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Return to your MySPIE ToDo list and approve or disapprove this submission. WFS board LUCIFER window Translation stages AGW structure Iljxuh 4= Wkh ohiw slfwxuh lv vkrzlqj wkh ZVI rswr0phfkdqlfv dwwdfkhg wr wkh DJZ vwuxfwxuh1 Oljwk lv hqwhulqj wkh ZIV diwhu uh hfwlrq rq wkh OXFLIHU zlqgrz1 Wkh uljkw slfwxuh lv vkrzlqj wkh ZIV xqlw wrjhwkhu zlwk wkh qhhghg hohfwurqlf er{hv1 5 ZIV rswr0phfkdqlfv ghvljq xsjudgh Wkh Rswlfdo ghvljq ri wkh DR v|vwhp ZdyhIurqw Vhqvru +ZIV, kdv ehhq pdgh wr dffrpprgdwh iru wzr ehdpv1 Rqh lv wkh zdyhiurqw vhqvlqj ehdp kdylqj wkh rswlfdo frpsrqhqwv rswlpl}hg iru wkh zdyhohqjwk udqjh ri 933qp  <83qp1 Wkh vhfrqg rqh lv d whfkqlfdo ehdp xvhg iru forvhg orrs rshudwlrq whvw dqg iru vwdu dftxlvlwlrq gxulqj whohvfrsh revhuydwlrqv1 Wklv odvw fkdqqho lv vxssrvhg wr zrun ehorz 933qp1 Dv suhylrxvo| ghvfulehg wkh v|vwhp ZIV lv d S|udplg Vhqvru +SV,9~; kdylqj d pd{lpxp vdpsolqj ri 63 vxedshuwxuh rq wkh sxslo gldphwhu1 Wdnlqj dgydqwdjh wkdw wkhuh lv qr qhhg wr frqmxjdwh wkh whohvfrsh sxslo wr wkh ghirupdeoh pluuru/ wkdw lq OEW lv wkh vhfrqgdu| pluuru lwvhoi6/7 wkh ZIV rswlfv fdq eh txlwh vpdoo li zh zdqw d vpdoo IRY/ derxw 6 dufvhfrqg/ iru wkh zdyhiurqw vhqvru1 Wkhq wr kdyh dydlodeoh d odujhu IRY iru wkh uhihuhqfh vwdu dftxlvlwlrq zh fdq pryh doo wkh vhqvru rswr0phfkdqlfv1 Iroorzlqj wklv lghd zh kdyh ghvljqhg d ZIV wkdw wv lq d erdug ri 653{733pp1 Wklv erdug lv glvsodfhg xvlqj wzr wudqvodwlrq vwdjhv wr dftxluh wkh uhihuhqfh vwdu lq wkh OEW i248 irfdo sodqh1 Xvlqj wklv dssurdfk zh kdyh dydlodeoh d IRY ri 6{5 dufplq1 D wklug vwdjh lv xvhg iru surshu irfxvlqj ri wkh xqlw1 Vxfk d xqlw kdv vhyhudo dgydqwdjhv zlwk uhvshfw wr d {hg dqg odujh xqlw= uhgxfhg vl}h/ qxpehu dqg frvw ri rswlfdo hohphqwv/ kljk rswlfdo wkurxjksxw/ plqlpl}hg qrq frpprq sdwk dehuudwlrqv/ uhgxfhg v|vwhp glhuhqwldo h{xuh/ uhgxfhg wxuexohqfh lq wkh ZIV rswlfdo sdwk/ hdv| whvwlqj ri wkh xqlw dv d vwdqg dorqh xqlw1 Wkh pdmru gudzedfnv duh wkh erdug glvsodfhphqw dqg wlow wkdw fdq frph rxw iurp wkh wudqvodwlrq vwdjhv lwvhoi1 Ioh{xuh fdq eh lpsruwdqw li zh frqvlghu wkdw wkh v|vwhp lv dwwdfkhg wr wkh whohvfrsh ghurwdwru dqg vr fkdqjhv lwv rulhqwdwlrq zlwk uhvshfw wr judylw| gxulqj revhuydwlrqv1 Wkh erdug dqg vwdjhv srvlwlrqv lqvlgh wkh DJZ vwuxfwxuh dqg wkhlu uhodwlyh duudqjhphqw lv txlwh lpsruwdqw wr plqlpl}h h{xuhv1 Wkhvh srvlwlrqv ghshqg lq wxuq rq wkh rswlfdo ghvljq xvhg iru wkh ZIV1 Wklv ghvljq kdv xqghujrqh d pdmru fkdqjh lq frpsdulvrq zlwk wkh suhylrxv yhuvlrq suhvhqwhg lq 53355 lq rughu wr uhgxfh wkh v|vwhp h{xuh1Zh uhsruw lq jxuh 4 wkh erdug rswr0phfkdqlfv ghvljq ehiruh dqg diwhu wkh ehdpv uhduudqjlqj uhvshfwlyho|1 Lq wkh suhylrxv vhw0xs wkh ZIV ehdp dqg whfkqlfdo ehdp zhuh sodfhg rq wkh vdph vlgh ri wkh lqfrplqj ehdp dv uhsruwhg lq j151 Wklv irufhg wkh erdug wr eh orfdwhg rq d vlgh ri wkh ehdp1 Krzhyhu dw wkh vdph wlph wkh wudqvodwlrq vwdjhv fdq qrw eh sodfhg wr pxfk rq d vlgh lq wkh flufxodu vwuxfwxuh ri wkh DJZ xqlw ehfdxvh wkh| kdyh wr surylgh ri wkh rughu ri 433pp wudyho udqjh lq wkh whohvfrsh irfdo sodqh wr surylgh wkh qrplqdo IRY iru vwdu dftxlvlwlrq ri 6{5 dufplq Wkh ixooophqw ri wkhvh wzr SPIE USE, V. 1 5169-17 (p.2 of 11) / Color: No / Format: A4/ AF: A4 / Date: 2003-08-01 11:21:09 Please verify that (1) all pages are present, (2) all figures are acceptable, (3) all fonts and special characters are correct, and (4) all text and figures fit within the margin lines shown on this review document. Return to your MySPIE ToDo list and approve or disapprove this submission. Iljxuh 5= Wkh rswlfdo ghvljq ehiruh dqg diwhu wkh ehdpv uhduudqjlqj15 Wkh wzr ehdpv ri wkh vhqvru zhuh sodfhg rq wkh vdph vlgh ri wkh lqfrplqj whohvfrsh ehdp +ohiw slfwxuh,1 Lq wkh qhz srvlwlrq wkh wzr ehdpv duh rq rsssrvlwh vlgh ri wkh lqfrplqj whohvfrsh ehdp1 Wklv ehdp duudqjhphqw doorzv wr sodfh wkh erdug zhoo fhqwhuhg rq wkh wudqvodwlrq vwdjhv lqfuhdvlqj wkh vhqvru vwdelolw|1 uhtxluhphqwv ohdghg wr srvlwlrq wkh ZIV erdug dqg wkh vwdjhv dvvhpeo| zlwk d fhuwdlq uhodwlyh glvsodfhphqw1 Lq wklv uvw frqjxudwlrq wkh qlwh hohphqw dqdo|vlv qg d pd{lpxp devroxwh wudqvodwlrq dqg urwdwlrq ri wkh erdug zlwk uhvshfw wr wkh doljqphqw srvlwlrq ri 54: p dqg 73 dufvhf uhvshfwlyho| zkhq wkh v|vwhp lv fkdqjlqj lwv rulhqwdwlrq zlwk uhvshfw wr judylw|1 Zh kdyh hydoxdwhg hyhq wkh udwh ri olqhdu dqg dqjxodu glvsodfhphqwv rewdlqhg fkdqjlqj wkh erdug rulhqwdwlrq zlwk uhvshfw wr wkh judylw|1 Wkhvh gdwd wkdw duh txlwh lpsruwdqw iru wkh fruuhfw forvhg orrs rshudwlrq1 Glhuhqwldo wudqvodwlrq dqg urwdwlrq ri wkh erdug uhvxowv 54 p2 dqg 91< p2 uhvshfwlyho|1 Wkh sxslo glvsodfhphqwv rq wkh ZIV FFG gxh wr wkhvh wzr hhfwv ohdg wr d sxslo glvsodfhphqwv ri 714 p lq rqh krxu ri revhuydwlrq lq dyhudjh frqglwlrqv1 Wr uhgxfh ixuwkhu wkhvh qxpehu zh kdyh fkdqjhg wkh ehdpv duudqjhphqw vr wkdw qrz/ dv vkrzq lq j=5/ wkh ZIV ehdp dqg wkh whfkqlfdo ehdp duh sodfhg rq rssrvlwh vlgh ri wkh lqfrplqj ehdpv1 Lq wklv vlwxdwlrq wkh erdug lv txlwh fhqwhuhg lq wkh DJZ vwuxfwxuh dqg fdq eh sodfhg rq wrs ri wkh vwdjhv dvvhpeo| djdlq fhqwhuhg lq wkh vwuxfwxuh1 Wkh qdo duudqjhphqw ri wkh vwdjhv lv uhsruwhg lq j16 vkrzlqj krz wkh wkuhh vwdjhv dvvhpeo| lv txlwh fhqwhuhg dqg edodqfhg zlwk uhvshfw wr urwdwlrqv1 Wkh qlwh hohphqwv dqdo|vlv kdv vkrzhg wkdw lq wklv qhz fdvh zh kdyh 58< p dqg 68 dufvhf iru devroxwh erdug wudqvodwlrq dqg urwdwlrq uhvshfwlyho|1 Iru glhuhqwldo glvsodfhphqwv dqg urwdwlrq zh rewdlq qrz 46p@ dqg 419 dufvhf2 = Wkhvh gdwd vkrz wkdw zh kdyh dq lpsuryhphqw lq wkh glhuhqwldo plvdoljqphqw lq erwk erdug glvsodfhphqwv dqg urwdwlrq1 Lq sduwlfxodu wklv odvw lv uhgxfhg ri d idfwru ri 7 zlwk uhvshfw wr wkh rog ydoxh1 Ilqdoo| lv lv lpsruwdqw wr qrwh wkdw wkh erdug glvsodfhphqwv fdq eh sduwo| fruuhfwhg xvlqj wkh wudqvodwlrq vwdjhv zkloh wkh erdug urwdwlrq fdq qrw eh fruuhfwhg lq dq| zd|1 SPIE USE, V. 1 5169-17 (p.3 of 11) / Color: No / Format: A4/ AF: A4 / Date: 2003-08-01 11:21:09 Please verify that (1) all pages are present, (2) all figures are acceptable, (3) all fonts and special characters are correct, and (4) all text and figures fit within the margin lines shown on this review document. Return to your MySPIE ToDo list and approve or disapprove this submission. Iljxuh 6= Ydulrxv ylhzv ri wkh qhz wudqvodwlrq vwdjhv dvvhpeo| wrjhwkhu zlwk wkh ZIV rswr0phfkdqlfv1 Erdug plvdoljqphqwv lq wklv fdvh duh uhgxfhg ri d idfwru 5 dqg 7 zlwk uhvshfw wr wkh suhylrxv dvvhpeo| iru glvsodfhpqhwv dqg urwdwlrqv uhvshfwlyho|1 6 Wkh Zdyhiurqw vhqvru FFG dqg UWF hohfwurqlfv Wkh zdyhiurqw vhqvru fdphud ri wkh DR v|vwhp lv edvhg rq d Pdufrql HHY06< ghhs0ghsohwlrq FFG/ zlwk dq hohfwurqlf frqwuroohu pdgh e| VflPhdvxuh Dqdo|wlfdo V|vwhp +XVD,1 Wkh HHY6< fkls kdv ;3{;3 sl{hov/ vsolwwhg lqwr irxu 73{73 txdgudqwv uhdg dw wkh vdph wlph1 Wkh qrplqdo uhdgrxw vshhg lv 518 Psl{ho2vhf iru hdfk txdgudqw/ iru d wrwdo ri 43 Psl{ho2vhf1 Hdfk sl{ho lv uhdg rxw rq 47 elwv1 Wdnlqj ydulrxv ryhukhdgv lqwr dffrxqw/ wklv uhvxowv lq d qrplqdo 4333 K} iudph udwh1 Dw wklv vshhg/ uhdgrxw qrlvh kdv ehhq phdvxuhg wr eh ohvv wkhq < h 1 Wkh frqwuro hohfwurqlfv doorzv wr uhgxfh wkh uhdgrxw vshhg grzq wr 483 Nsl{ho2vhf/ zlwk d fruuhvsrqglqj ghfuhdvh lq iudph udwh dqg uhdgrxw qrlvh1 Zh kdyh shuiruphg vhyhudo phdvxuhphqwv wr txdqwli| wkh URQ dw glhuhqw sl{ho uhdg0rxw udwh1 Uhvxowv duh uhsruwhg lq j17 wkdw vkrzv wkh phdvxuhg URQ ydoxhv lq h dv d ixqfwlrq ri wkh iudph udwh iru qr dqg 5{5 elqqlqj prghv1 Lw lv lpsruwdqw wr qrwh wkdw xvlqj rq fkls elqqlqj zh fdq fkdqjh wkh sxslo vdpsolqj lq rughu wr kdyh 63{63/ 48{48/ 43{43/ dqg vr rq zlwkrxw fkdqjlqj wkh URQ ru wkh rswlfdo frqjxudwlrq1Ilj1 7 lv vkrzlqj wkdw dw derxw 983 isv lq d 48{48 vxedshuwxuh prgh zh kdyh d URQ ri derxw 615 h wkdw fdq eh d yhu| jrrg frpsurplvh ehwzhhq vshhg dqg URQ1 Gdun fxuuhqw zdv phdvxuhg lq wkh udqjh ri 4 wr 833 ploolvhfrqgv ri h{srvxuh wlph1 Wkh gdun fxuuhqw ydoxhv zdv irxqg wr eh 933 h02vhf dw d whpshudwxuh ri 063 F lq jrrg djuhhphqw zlwk wkh HHY vshflfdwlrqv1 D sorw ri wkh phdvxuhg ydoxhv lv vkrzhg lq j171 Sl{ho ydoxhv gdwd uhdg rxw iurp wkh FFG duh ihhg lqwr wkh uhdo wlph hohfwurqlf v|vwhp1 Wklv v|vwhp lv frpsrvhg ri d qxpehu ri lghqwlfdo erdugv/ fdoohg EFX +Edvlf Frpsxwlqj Xqlw,/ pdqxidfwxuhg e| PlfurJdwh1 Hdfk EFX kdv wkuhh pdlq frpsrqhqwv= SPIE USE, V. 1 5169-17 (p.4 of 11) / Color: No / Format: A4/ AF: A4 / Date: 2003-08-01 11:21:09 Please verify that (1) all pages are present, (2) all figures are acceptable, (3) all fonts and special characters are correct, and (4) all text and figures fit within the margin lines shown on this review document. Return to your MySPIE ToDo list and approve or disapprove this submission. 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Return to your MySPIE ToDo list and approve or disapprove this submission. 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Return to your MySPIE ToDo list and approve or disapprove this submission. 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Return to your MySPIE ToDo list and approve or disapprove this submission. 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